A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
نویسندگان
چکیده
منابع مشابه
A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in” instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is f...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2013
ISSN: 2072-666X
DOI: 10.3390/mi4040431